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LNEYA thermal chillers are designed for demanding temperature control applications and helps you with your business with professional technology.
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Précision du contrôle de la température
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| FLTZ | 202/202W~215/215W | ||
| Plage de température | -25℃～90℃ | ||
| Précision du contrôle de la température | ±0.05℃（Température de sortie à l'état stable） | ||
| Contrôle du débit | 10~75L/min | ||
| Capacité de refroidissement @-15℃ | 2kW~15kW | ||
| Volume de liquide de circulation interne | 4L~20L | ||
| Volume du réservoir d'expansion | 10L~35L | ||
| Réfrigérant | R404A | ||
| Milieu réfrigérant | Huile de silicone, liquide fluoré, solution de glycol, etc. | ||
| Débit d'eau de refroidissement @20℃ | 1.2m³/H~10.2m³/H | ||
| Dimension en cm | 950*380*1055~1080*600*1500 | ||
• The chiller can help the process control the temperature of the cleaning tank to avoid thermal stress causing wafer warping and prevent the pump unit from overheating.
• Specific constant temperature environment must be maintained after photoresist coating.
• During dry etching, the cavity RF power supply must be kept cool within a specific temperature range to prevent overheating and process drift.
thermal chiller is widely used in semiconductor application scenarios that require two-way temperature control due to its wide temperature range.
Wafer cleaning requires the use of chemical liquids such as SC1 (ammonia + hydrogen peroxide) and SC2 (hydrochloric acid + hydrogen peroxide) to clean the wafer, and the reaction temperature must be stably controlled at 25℃-80℃,The chiller can help the process control the temperature of the cleaning tank to avoid thermal stress causing wafer warping and prevent the pump unit from overheating.
DUV/EUV lithography machines are extremely sensitive to temperature fluctuations, so a specific constant temperature environment must be maintained after photoresist coating. Semiconductor chillers can provide a constant temperature environment for lithography machines.
During dry etching, the cavity RF power supply must be kept cool within a specific temperature range to prevent overheating and process drift.
In addition, semiconductor back-end processes such as metal interconnection, packaging, and testing have strict requirements on temperature uniformity and require the help of thermal chillers.
Temp range -25~90℃
Précision de la température ±0.05℃
Temp range -45~90℃
Précision de la température ±0.05℃
Temp range -80~90℃
Précision de la température ±0.05℃
Temp range -100~90℃
Précision de la température ±0.05℃
Plus de 30 000 clients ont été servis.
Exporté dans plus de 20 pays.
A obtenu la certification CE, la certification SGS et la certification ISO.
Fournir une formation technique complète.
Avec des solutions 24h/24 et 7j/7.
Fondée en 2010, avec 15 ans d'expérience dans le secteur.
20% des employés sont des techniciens.
Contrôle visuel.
Test de performance.
Test de sécurité électrique.
Get in touch with our Thermal chiller experts
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